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Metrology Station Monitor

  • Writer: Mark Murphy
    Mark Murphy
  • Jul 19, 2011
  • 1 min read

Finding problems and optimizing process requires collecting and analyzing data after each step of wafer fabrication. These interface modules were for various CD, thin film and resistivity measurement equipment. Working for Bayliss Automation, I specified and wrote a Windows-based application for data acquisition and alarm logging. The product, called a Metrology Station Monitor, was implemented for several customers across the US.

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